1: To approve the issuance of shares of Axcelis Technologies, Inc. (“Axcelis”) common stock (the “Axcelis Share Issuance Proposal”) pursuant to the Agreement and Plan of Merger, dated as of September 30, 2025, by and among Axcelis, Victory Merger Sub, Inc., a wholly owned subsidiary of Axcelis, and Veeco Instruments Inc. – For (1.047)
2: To approve the adjournment of the special meeting, if necessary or appropriate, to solicit additional proxies if there are insufficient votes to adopt the Axcelis Share Issuance Proposal. – For (1.047)
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